The MEMS (Micro-Electro-Mechanical Systems) high-temperature pressure sensor is a pressure measurement device based on micro-nano technology
The fabrication process of MEMS high-temperature pressure sensors includes steps such as photolithography
The application of MEMS high-temperature pressure sensors is very extensive,
Strain gauge pressure sensor is a common pressure measuring device used to measure the strain changes caused by the force on an object
Bridge circuit: Strain gauges usually exist in the form of resistors
Signal conditioning circuit: The signal conditioning circuit amplifies,
